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IC and Hybrid Processing Equipment
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Platform accelerates wafer throughput
The CPX cluster platform enables multiple process chambers to share a common wafer transport system.
News from Surface Technology Systems (12 September 2005)
Small footprint lapping machine on show in Paris
Engis Corp will be exhibiting a range of products, including the new, small footprint Hyprez Microtech AM-15 lapping machine, at the EuMW/GaAs show in Paris, in October.
News from Engis (UK) (30 August 2005)
University adopts maskless lithography
The Durham University Centre for Electronics has purchased a DWL66 maskless lithography system from Heidelberg Instruments.
News from Heidelberg Instruments (29 August 2005)
Saunders takes top job
Surface Technology Systems has appointed John Saunders as Chief Executive Officer.
News from Surface Technology Systems (25 August 2005)
Bosch orders deep reactive ion etch system
Surface Technology Systems has received an order for its new Pegasus deep reactive ion etch system from leading automotive MEMS device manufacturer Robert Bosch.