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Product category: IC and Hybrid Processing Equipment
News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial Team on 19 August 2005
Bosch orders deep reactive ion etch
system
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Surface Technology Systems has received an order for its new Pegasus deep reactive ion etch system from leading automotive MEMS device manufacturer Robert Bosch.
Surface Technology Systems has received an order for its new Pegasus deep reactive ion etch system from leading automotive MEMS device manufacturer Robert Bosch The order from Bosch strengthens STS' long-standing relationship with the German company, and is the fifth such order since Pegasus was launched on 28th June 2005