University adopts maskless lithography

The Durham University Centre for Electronics has purchased a DWL66 maskless lithography system from Heidelberg Instruments.

The Durham University Centre for Electronics has purchased a DWL66 maskless lithography system from Heidelberg Instruments.

The DWL66 is a novel maskless lithography system for mask making and direct writing.

This system is capable of producing patterns down to 0.6um, and is equipped with the capability of thick resist and grey scale exposure, in addition to metrology, front to backside and layer to layer alignment.

"DWL66 systems continue to be a leading platform in direct write laser lithography applications among the research institutions".

"We welcome Durham University to the community of over 80 research institutions who currently use this system and look forward to a long standing co-operation", said Alexander Forozan, Vice President of World Wide Sales and Marketing, Heidelberg Instruments.

"The mask writer will be installed in Durham's School of Engineering and its primary role will be in the manufacture of high quality holographic optical masks for the Centre for Electronics group".

"This application concerns holographic lithography and the need to create amplitude and phase structures on the micron scale".

"Colleagues working in our molecular and nanoscale electronics group will also find this tool useful for creating standard lithography masks and MEMS structures", added Dr Richard McWilliam, Durham University.

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