News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial Team on 24 January 2006

Process platform suits pilot production

The VPX platform that enables up to three process chambers to share a low-cost, common wafer-transport system.

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New from Surface Technology Systems, the VPX platform that enables up to three process chambers to share a low-cost, common wafer-transport system. Designed to reduce the cost for pilot production of devices used in developing end markets such as fuel cells and MEMS automotive sensors, VPX complements the full suite of platforms that support STS' range of advanced process modules. The introduction of VPX continues STS' successful strategy of supplying a range of platforms that can be coupled to any of their advanced process modules to meet varying customer business models and changes in wafer capacity.

VPX provides an automation platform to service up to three STS plasma process modules with a single-vacuum 25-wafer cassette, offering a low-cost clustered processing system while maintaining very high standards in terms of handling accuracy and wafer-transport integrity, as well as improved productivity, production-proven hardware and ease of maintenance.

VPX is particularly well-suited to pilot production markets in fabs and foundries where manufacturers are introducing new device technology from their R and D laboratories.

Building on an extensive experience of manufacturing systems for pilot production, and with an installed base of over 1000 etch and PECVD systems over 10 years, STS has chosen the Brooks Marathon Express MX400 automation platform as the backbone of the new system, as it shares over 90% of the components already used in CPX, STS' volume production cluster system, launched in September 2005.

'Utilising Brooks' MX400 automation has enabled STS to release the new VPX platform in record time, a development that further extends our product range to meet our customers' evolving needs', observed Leslie Lea, Chief Technology Officer at STS.

'By developing both the CPX and VPX platforms around a single supplier we have been able to reduce the organisation's holistic costs, both in development and supply, allowing us to pass these cost savings on to our customers.

We believe the VPX is a top-notch solution offered at a very competitive price point'.

'STS has already taken multiple orders for VPX systems from major companies in the US who are in the first stages of production of new device technologies', added Dr David Haynes, STS Director of Sales and Marketing.

'We firmly believe that the new tool, coupled with our leading edge process technologies, such as advanced silicon etch (ASE) and advanced oxide etch (AOE), considerably strengthens our position in our served markets, offering scalability between platforms to meet the exacting requirements and investment cycles of existing and potential customers'.

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