Product category: Analogue and Mixed Signal ICs
News Release from: Freescale Semiconductor
Edited by the Electronicstalk Editorial Team on 16 October 2001
Motorola and CEA-Leti
co-operate on new MEMS
Motorola and CEA-Leti are to jointly develop and industrialise the next generation of surface micromachined linear inertial sensors
Motorola's reckons its actions underscore its commitment to MEMS sensors and actuators, and is a critical step towards meeting the market's needs for advanced products, improved reliability, and aggressive learning curves. "As a leader in pressure and inertial sensors, we are continuously looking to work with major players to help develop new technologies and new products needed by our customers.
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We are extremely pleased to work with CEA-Leti in the field of accelerometers.
We expect that this cooperation will be further extended to other programs and technologies", said Brett Richmond, Vice President and General Manager, Sensor Products Division of Motorola SPS.
"This new collaboration with Motorola, one of the world leaders in MEMS technologies and products, is a major R and D challenge for CEA-Leti.
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It constitutes an incentive to gain international recognition of our technical know-how and industrial property, and we will strive to make our contribution to this program a success", says Jean Therme, Director of CEA-Leti.
Both Motorola and CEA-Leti plan to focus their intellectual property towards the establishment of this technology platform.
The planned result of this collaboration is the development and industrialisation of a high aspect ratio, highly manufacturable, and cost effective wafer processes based on 200mm substrates.
Product development platforms are expected to cover low, medium, and high sensitivity transducers based on overdamped lateral interdigitated structures.
This will enable devices with an enhanced signal to noise ratio, which will be an advantage in the market place.
Motorola expects to commercialise this new generation of accelerometers targeting automotive, industrial, and consumer markets with sampling of leading customers in 2003, and volume production ramp-up in 2004.
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