Maskless lithography system has table-top format
A Heidelberg Instruments product story
Edited by the Electronicstalk editorial team Jan 11, 2006
The uPG101 is an extremely economical and easy to use micro pattern generator for direct write applications as well as low volume mask making.
Heidelberg Instruments has developed a tabletop maskless lithography system, the uPG101.
The uPG101 is an extremely economical and easy to use micro pattern generator for direct write applications as well as low volume mask making.
It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 x 4in, and is capable of exposing features down to 5um, with an address grid of 100nm.
The uPG101 maskless lithography system offers a very small footprint of 600 x 600mm.
It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system.
Applications include MEMS, bio-MEMS, integrated optics, microfluidics, uTAS, or similar areas requiring microstructures.
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