Product category: Electronics Manufacturing Machinery and Materials
News Release from: Vistec Semiconductor Systems
Edited by the Electronicstalk Editorial Team on 13 July 2006
Inspection systems for Asian foundry.
Vistec Semiconductor Systems (previously Leica Microsystems Semiconductor ) recently delivered a number of LDS3300 inspection systems to a major Asian 300mm foundry
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The Asian foundry has successfully used the 200mm version, the LDS3000 system, for lithography inspection and final optical inspection for many years. Last year they completed a 6-month evaluation of the 300mm systems LDS3300 C and LDS3300 M, and placed an order for a number of both LDS3300 systems for 300mm production, which is now being delivered.
'The unique LDS3300 C system concept, combining macro and micro defect detection with a review function helps increase productivity'.
'This was a decisive factor in the decision to go with our system', explains Vistec's General Manager Gerhard Ruppik.
The system can quickly and reliably identify process excursions, and thereby helps to resolve them in real time.
The high throughput (130 wafers / hour) and the very low false count rate and the fab integration capability were further factors that sealed the deal for Vistec.
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