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Product category: Microprocessors, Microcontrollers and DSPs
News Release from: TSMC
Edited by the Electronicstalk Editorial Team on 24 February 2006
Immersion lithography passes the test
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TSMC has revealed that its immersion lithography programme has produced test wafers well within acceptable parameters for volume manufacturing.
TSMC has revealed that its immersion lithography programme has produced test wafers well within acceptable parameters for volume manufacturing The findings, to be revealed by TSMC researchers at the SPIE Microlithography Conference in San Jose, prove the value of TSMC's proprietary techniques for nearly defect- free immersion lithography
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