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Product category: IC and Hybrid Processing Equipment
News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial Team on 06 July 2007
Plasma processing systems for the Ivy
League
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Inductively coupled plasma and plasma enhanced vapor deposition tools to be installed at Harvard University's Center for Nanoscale Systems.
Surface Technology Systems has sold two plasma processing systems to Harvard University, one of the prestigious "Ivy League" institutions in Northeastern USA The inductively coupled plasma (ICP) and plasma enhanced vapor deposition (PECVD) tools will be installed within the University's Center for Nanoscale Systems