Product category: Electronics Manufacturing Machinery and Materials
News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial Team on 6 April 2006
MEMS foundry orders first cluster tool
Surface Technology Systems has received its first order for a VPX cluster tool with a Pegasus deep reactive ion etch (DRIE) process module, from Dalsa Semiconductor
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Recently quoted for the second year in a row by Yole Developpement in the 'Status of the MEMS industry 2005 edition' report as the number one MEMS foundry, Dalsa Semiconductor will be utilising the tool in the production of a number of silicon MEMS devices, including gyroscopes for image stabilisation in digital cameras.
Commenting on the purchase of the VPX tool and Pegasus module, Luc Ouellet, Dalsa Semiconductor's Director of Technology Development, explained: 'compared with the alternative systems we tested, STS' Pegasus etch source demonstrated a significantly better device yield for a demanding gyroscope application as well as higher etch rates and overall productivity for other DRIE applications targeting consumer electronics applications'.
'In addition, the flexibility of the VPX platform means that Dalsa Semiconductors can easily add process modules to the Brooks Automation cluster core and will allow us to increase production capacity very quickly as our business requires'.
John Saunders, CEO of STS, commented: 'We are delighted with this order from the leading MEMS foundry, and are excited about the early success of our new cluster tool, which was only launched in the middle of January 2006'.
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'The new VPX wafer handling platform can accommodate up to three process chambers and offers a cost-effective alternative to our larger six-port cluster system'.
'This is an option we are sure will be welcomed by many more customers in the future who require scalability for their manufacturing business'.
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