Product category: Electronics Manufacturing Machinery and Materials
News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial Team on 26 July 2004
Plasma etch system bound for TSMC
Surface Technology Systems has received an order to supply Taiwan Semiconductor Manufacturing Company with a cassette to cassette high-rate ASEHRM plasma etch system
The system will be installed straight into an existing 150mm line at TSMC Fab 2 in Hsinchu, Taiwan with minimal disruption, illustrating STS' ability to supply even the most demanding of production environments. TSMC is a "pure play" foundry which manufactures customer products according to their design specifications.
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Once installed, the STS system will be used to fabricate products at TSMC, a development in that it gives an early indication that TSMC is looking to MEMS as a likely future market sector.
The TSMC installation increases the number of STS systems in Taiwan (for all applications) to over 35.
STS systems are now installed in every MEMS foundry in Taiwan.
A key factor in STS securing the deal with TSMC was the experience of STS' Taiwanese agent, Challentech International Corporation which, supported by a locally based STS service engineer, was able to offer superior service support to Taiwan's customers.
Mutsuo Mukuda, Vice Chairman of STS, explained: "We see this order as evidence that MEMS manufacturing is a market assuming greater significance".
"As the leader in deep silicon etch, STS continues to be the first to break new ground and as the market expands, STS will maintain its majority market share in this growing application area".
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