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Product category: IC and Hybrid Processing Equipment
News Release from: Keithley Instruments
Edited by the Electronicstalk Editorial Team on 17 April 2003
Pair collaborate on copper and low-k
integration
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Keithley Instruments is working with Novellus Systems to develop electrical process diagnostic tests for copper and low-k integration.
Keithley Instruments is working with Novellus Systems to develop electrical process diagnostic tests for copper and low-k integration based on Keithley's S600 automatic DC parametric test platform These automated electrical tests will reduce copper process development time and result in improved product yields for Novellus' and Keithley's customers