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Product category: Recruitment, Reports and Resources
News Release from: IMEC
Edited by the Electronicstalk Editorial Team on 09 December 2005

NiSi integration offers path below 45nm

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IMEC has announced a simple CMOS integration scheme of a NiSi gate for NMOS and a Ni2Si gate for PMOS on HfSiON with simultaneous two-step silicidation.

At this week's IEEE International Electron Devices Meeting, IMEC announced a simple CMOS integration scheme of a NiSi gate for NMOS and a Ni2Si gate for PMOS on HfSiON with simultaneous two-step silicidation The potential of this novel integration process has been proven with ring oscillator demonstration

Alternative FUSI approaches such as adding Yb to Ni FUSI allowed further tuning of the work function to lower Vt, enabling dual gate CMOS technologies based on FUSI for (sub)-45nm.

FUSI gates are an interesting approach to overc