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Advanced Vacuum (AV) has released a new open load plasma system for RIE and PECVD processes called the Vision 300-series.
AV will manufacture the new system under license from Surface Technology Systems (STS).
The Vision 300 series is the result of a joint development between AV and STS to redesign the successful STS 300-series system which has been manufactured by STS for over 20 years with an install base of over 150 systems worldwide.
The new system has been designed to improve reliability and performance with a user-friendly interface.
"With the Vision 300 series we have realised STS technology for current and future markets for open load plasma systems", said Thomas Engstedt Technical Director, AV.
"We are pleased to see how AV have repackaged the original design using their award winning Concept III PLC based control system", added Andrew Chambers, technology director, STS.
"The result is a next generation system that can offer the extensive STS process library with the benefits of improved reliability and performance".
 

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