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Product category: Stand-Alone Instruments
News Release from: Hitachi High-Technologies (Electron Microscopy) | Subject: S-4800 FESEM
Edited by the Electronicstalk Editorial Team on 28 June 2004

Microscope resolves to handle 8in wafers

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The S-4800 FESEM from Hitachi High-Technologies represents a breakthrough in FESEM technology, offering resolution figures of 1.0nm at 15kV yet capable of handling specimens up to 8in diameter.

The S-4800 FESEM from Hitachi High-Technologies represents a breakthrough in FESEM technology, offering resolution figures of 1.0nm at 15kV yet capable of handling specimens up to 8in diameter The instrument combines large sample handling capabilities with the image resolution normally associated with in-lens scanning electron microscopes (SEMs) and can be seen for the first time in the UK at Microscience 2004, 6th-8th July 2004