Product category: Electronics Manufacturing Materials and Consumables
News Release from: ASML
Edited by the Electronicstalk Editorial Team on 31 August 2006
Extreme ultraviolet tools are shipped
ASML has shipped two extreme ultraviolet alpha demo tools to customers.
ASML Holding has shipped two extreme ultraviolet (EUV) alpha demo tools (ADT) to customers Both the College of Nanoscale Science and Engineering (CNSE) of the State University of New York (SUNY) at Albany and the nanoelectronics research institute IMEC in Leuven, Belgium, have received these industry first, full field EUV systems
This article was originally published on Electronicstalk on 13 Jul 2006 at 8.00am (UK)
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Both institutions will use these R and D tools after installation to conduct ongoing research into this next generation lithography technology.
Shipments were possible