News from: Alliance Sales (Europe)
Edited by: Electronicstalk Editorial Team on 21 October 2002
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The world's most advanced vapourisation system for producing high-quality vapour from liquid source chemicals used in CVD thin film deposition of semiconductor wafers and substrates has been introduced to Europe by Alliance Sales (Europe).
MSP's 2800 Vaporizer features patented vapourisation technology for producing high purity source chemical vapours.
Alliance Sales (Europe) will be responsible for sales and technical support of MSP's 2800 system, which utilises advanced fine droplet atomisation technology to achieve rapid and complete droplet vapourisation.
The system achieves a high quality performance because there is no thermal decomposition and residue contaminant generation in the gas phase.
The 2800 features a large heat transfer area to produce high liquid/gas mass ratios and incorporates a three stage heating system to completely vapourise the liquid and eliminate fogging during pressure reduction.
The system includes an internal replaceable filter to remove contaminant particles to 2nm and features high performance gas/liquid flow controllers to ensure accurate gas/vapour mass flows.
The liquid source chemical can also be turned on and off quickly for accurate vapour flow control.
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